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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Substrate

Liquid filters for substrate processes in data storate applications

Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for aluminum and glass substrate manufacturing processes, including: etching, detergent, cleaning, grinding, Ni/Zn plating, polishing, lapping, H₃PO₄ cleaning, KOH cleaning DHF cleaning DI/IPA cleaning processes and chemistry.

Filter products by Application or Process Step

Filter Results: Your selection returned the following items within this category.

Panelgard™ Filters Designed for point-of-use filtration in flat panel display manufacturing applications.	ProcessGard® Filters Designed for prefiltration of DI Water and process chemistries.	QuickChange® Nondewetting PTFE Filters Designed for use in advanced liquid filtration with both aqueous and non-aqueous chemistries. All PTFE membranes.
Fluorogard® Filters PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.	Intercept® Cartridge and Disposable Filters Most advanced dual-retention filtration for critical DHF/BOE cleaning applications	Protego® Filters/Purifiers Designed to remove metal ion contamination from ultrapure water and some organic solvents.
Chemlock® Housings Designed for tool space saving and easy filter cartridge changeout.