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Planargem™ pad conditioners are designed to maintain constant surface morphology and consistent material removal rate (preventing "glazing"). Featuring a patented diamond deposition to encapsulate the diamonds on the substrate, Planargem pad conditioners are the most chemically inert conditioner on the market. The CVD diamond surface is also the strongest diamond adhesion mechanism available. The pad conditioner design allows for conditioning in harsh environments and chemistries such as in-situ Tungsten, as well as configuration for the latest 32 nm technologies requiring gentle conditioning when polishing extremely sensitive surface features.
CVD Disk