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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Liquid Systems

Specialized Purification and Chemical Handling Systems

Solving the complex fluid management and process optimization challenges requires expertise in the mechanical operation of the technology and software available along with the right selection of components, but that is not all it takes to lead in the systems business. "Catalog" type systems suppliers pick and choose components to build within established boundaries. The Entegris team does not limit our imagination to just the available options. We look to understand the problems customers face and then look into our diverse portfolio of fluid handling, filtration, purification, systems, materials and storage products to introduce the right solution for each customer. Our broad technology platforms and service capabilities allow us to also develop new components, systems and materials to serve unique needs. 

No two fluid systems are alike in our eyes. We take a holistic view of how we solve these challenges: listen first and then act. Whether it is a pressure booster, contacting system, mixing controller, ultrapure water purifier, heat exchanger, dispense system, gasification unit or other fluid systems you can envision, Entegris is a systems designer and manufacturer that brings answers to our customers challenges.

Chemical Mixing

On demand mixing and delivery of temperature controlled DI Water into process tanks

Gassification

Introduction of gas into liquids in dilute and bubble-free manner

UPW Purification

Bubble-free UPW purification for immersion lithography scanner applications

Custom

Specialized system design and manufacture utlizing the depth of component experience and technology with expertise in our customer's processes