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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Systems

Entegris provides specialized systems design and manufacturing to a variety of high performance applicaitons in the semiconductor, flat panel display, data storage and other microelectronic markets.  Combining a wide breadth of component and customer process knowledge, the systems design and manufacuturing teams deliver systems that meet the exacting standards set by our customers.   Entegris is currently designing and manufacturing systems for gas and liquid applications.

Liquid Systems

Specialized chemical mix, purification and management soltuions