Shanghai New International Expo Centre (SNIEC)
Event Dates
March 16-18, 2010
Visit Entegris at Hall W4, Booth #4311
Please contact your sales representative for more information on Entegris' three paper presentations at the CSTIC conference for Microenvironment and Contamination Control Solutions.
Featured Products
Planarcore® PVA Brushes
Designed for use with AMAT®, OnTrak® and Ebara® CMP equipment, Planarcore® PVA brushes feature molded-through-the-core construction for superior performance and wafer-to-wafer cleaning consistency.
Impact® Filters
Impact® point-of-use (POU) filters with asymmetric nylon membranes reduce the formation of microbridging defects in 193 nm photolithograpy applications.
Planargem™ Pad Conditioners
Are designed to maintain consistent surface morphology and consistent material removal rate (preventing glazing).
CR8 Series Valves and Manifolds
The new CR8 series includes valves and valve manifolds for ultrapure chemical applications. This product line offers two-way pneumatic and manual valves, and manifolds for low to medium flow applications, with flow factors (Cv) ranging from two to four. The valves offer reliable performance and easy serviceability – with a footprint that is smaller than most half-inch valves.
NT® 6520 Integrated Flow Controller
The NT® 6520 Integrated Flow Controller (IFC) is one of the smallest liquid controllers available for accurate point-of-use blending and dispense applications.
450 mm Wafer Handling Products
Entegris has launched a new, beta 450 mm wafer carrier to permit early 450 mm equipment integration and wafer handling studies based on the latest 450 mm fab carrier SEMI® standards. In addition to this launch, Entegris recently introduced a 450 mm single wafer shipper and a 450 mm multiple wafer shipper (FOSB). Entegris beta 450 mm FOSB, with ISTA-qualified secondary packaging system, permits successful shipments of 450 mm wafers worldwide.
Spectra™ FOUP Technology Advancements
Entegris now offers several new enhancements to its 300 mm FOUP line of products. These include a new FM4911 Approved FOUP made with fire retardant material for reduced risk of fire and smoke propagation in the fab, along with greatly-reduced costs for insurance; new snorkel technology to allow for dramatic purge time reductions; the Clarilite® wafer fits in any wafer slot to absorb contaminants and moisture during storage in order to maintain a clean microenvironment; and new barrier materials that help prevent permeation of contaminants through the FOUP shell, allowing for longer queue times and increased yields. Entegris beta 450 mm FOSB, with ISTA-qualified secondary packaging system, permits successful shipments of 450 mm wafers worldwide.
Specialty Materials
Premium graphite and silicon carbide for high-temperature applications, surface metallurgy and engineered coating solutions
Flat Panel Display Solutions
The Flat Panel Display (FPD) fabrication environment is among the worlds' most competitive and technologically complex. Device designers and manufacturers continually strive to satisfy the worldwide consumer's appetite for larger displays, greater pixel resolution and feature-rich performance – all at a lower cost than the previous generation of technology.
Solar Solutions
Entegris brings a broad portfolio of proven contamination control, fluid management and substrate handling solutions to solve the challenges faced in the manufacturing environment. Whether it is preventing damaging sources of contamination from reaching the wafer/substrate or the safe transport throughout the fab, Entegris provides the solar industry the answers to the challenges of improving yield and product performance to sever the growing appetite for cleaner energy generation.